An ultimate solution against Airborne Molecular Contamination (AMC).

Adixen POD Regenerator (APR) for <130 nm nodes decontaminates wafers and their carrier providing molecular decontamination and active protection in one go.

Benefits
- Stops crystal growth / Corrosion
- Relaxes queue time rules and simplifies storage management.
- Eliminates AMC such as HF, HCl, VOC in carrier environment and on the substrate.
- Removes Air & Halogen & organic compounds
- Protects carrier and substrate within from contaminated environments for days.
- Suppresses fab cross contamination risks
- Low CoO.

Assurance to the yield improvement.


For more information, please contact Roland BERNARD: roland.bernard@adixen.fr