Dry pumps for fast evacuation of medium process

ADKP range: large dry pumps for medium processes

Based on the field proven Series Two dry pumps, Alcatel proposes high capacity dry pumps able to answer the needs of Solar process applications as PECVD Ni or a-Si.
This range is composed of 2 versions : AD70KP and AD140KP, depending on required pumping speed.

Key features

• High pumping speed (up to 7,100 m3/h)
• Low footprint
• Low CoO
  o  Reduced power consumption
  o  Low cooling water requirements
  o  Easier layout management

Benefits

• The ADKP range is relying on the long time proven multistage roots technology, which provides one of the lowest energy consumption on the market
• Thanks to frequency converters, the pumps are independent from the network frequency
• Adixen expertise on stringent H2 pumping and amorphous silicon handling
• Separated wheel mounted frames for easy maintenance
  

Applications: 

• Solar Manufacturing Processes (a-Si, µ-Si, CGIS, CdTe, …)
• NF3 cleans compatible : Silicon based processes