The Adixen ATP 2300 M is a 5 active axis maglev turbomolecular pump, that benefits from Adixen 10 years large experience in Maglev pump design.
It has been specially designed for the Hydrogen and the light gas pumping. Its pumping capacity, above 1750 l/s in H2, make it suitable for the HDPCVD Dielectric and Ion Implant applications. Features include low level of vibration, high compacity (less than 300 mm high), and a low power consumption.