Alcatel Vacuum Technology of France has launched a new optimized dry pump and abatement installation approach dramatically increasing available space in crowded fab basements by reducing the footprint for one tool by 30 - 70 percent.
The Alcatel Tool Pumping Solution (ATPS) provides hook-up and start-up time reduction, fully independent pumping lines, lower noise level, abatement modules integration, increased safety and easy maintenance.

If you need more information you can contact Bertrand Seigeot
email : bertrand.seigeot@an.cit.alcatel.fr