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Hydrogen leak detection for Semiconductor applications

Application - Hydrogen for semiconductor manufacturing processes.

Hydrogen gas is used in number of semiconductor manufacturing processes.

The use of hydrogen as a process gas is particularly increasing in the manufacturing of Ultra Large Scale Integrated Circuits. Piping, manifolds, valves and cylinders which contain or distribute hydrogen gas have to be kept tight for obvious safety reasons.
Leak detection of these gas circuits is easy using an Adixen Sensistor H2000 PLUS Hydrogen Leak Detector. Thanks to its light weight (<5Kg) and small size the H2000 PLUS is truly portable. Minute leaks as small as 5 x 10E-7 mbarl/s can be detected and located. If leak detection needs to be done in an EX classified zone, the ATEX certified EXTRIMA Hydrogen Leak Detector is recommended.

For further information about EX applicability please contact your nearest Adixen sales office.