Based on mastered multi-stage roots technology, Alcatel Vacuum Technology provides a wide range of dry pumps covering all the requirements of 200mm & 300mm Front-End and Back-End applications.
• Light processes: Load Lock, Transfer, Sputtering, PVD, Metrology…
• Medium processes: Etching, Implant, Stripping, RTP...
• Harsh processes: CVDs... Harsh process :
Harsh applications include most of the CVD processes. These applications are real challenges for dry pumps, where very corrosive and/or powdery by-products are generated.
ADP/ADS Series Two are the pumps of choice for such applications. Especially adapted to withstand the harshest environment, ADP/ADS Series 2 H includes all the features of Series 2 P plus enhanced purge dilution line and corrosion resistant materials to insure the highest reliability.
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