The number of products used in everyday life that require vacuum coating is increasing rapidly. Vacuum coatings are used to enhance a product’s cosmetic apearance as well as its functionality.
Adixen vacuum products have a proven record of high reliability and high performance in R&D as well as in high volume production coating applications. They have been used successfuly in PVD or reactive sputtering, thermal evaporation and CVD, chemical vapor deposition.
Each of these coating processes presents its own set of challenges for the vacuum system. Alcatel Vacuum Technology has developed several different pumping solutions, each tailored to the demands of a specific vacuum coating process.
Below you will find an overview of several coating applications and the recommended Adixen products, by product type. Tool and/or decorative Coating :
Tool coating is used to improve hardness and wear resistance of tools. Tool and decorative coatings are applied in a high production environment requiring a reliable and robust vacuum solution.
Pumping solutions
The Adixen Magnetically levitated turbomolecular pumps (ATH-M Series) have demonstrated complete compatibility with these application requirements. For DLC coating, the ATP2300M turbo has proven to be a suitable solution due to high Hydrogen pumping performance.
Additionally, large PASCAL Series rotary vane pumps with Roots can be used.
Leak detection
ASM 142 Series helium leak detectors are ideal solutions.
Pressure measurement and control: ACC2009 vacuum gauges provide accurate and robust pressure management of process chamber.
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