The number of products used in everyday life that require vacuum coating is increasing rapidly. Vacuum coatings are used to enhance a product’s cosmetic apearance as well as its functionality.
Adixen vacuum products have a proven record of high reliability and high performance in R&D as well as in high volume production coating applications. They have been used successfuly in PVD or reactive sputtering, thermal evaporation and CVD, chemical vapor deposition.
Each of these coating processes presents its own set of challenges for the vacuum system. Alcatel Vacuum Technology has developed several different pumping solutions, each tailored to the demands of a specific vacuum coating process.
Below you will find an overview of several coating applications and the recommended Adixen products, by product type. Architectural glass coating :
Large panes of glass are coated, generally via PVD or reactive sputtering, in a high production environment. The high reliability as well as ease of use and integration of Adixen Maglev turbomolecular pumps has been praised by our glass coating customers. Hundreds of ATH1600M and ATH2300M are used on coater all around the world.
Additionally, when large numbers of pumps are installed on a coater, Adixen offers a Central Monitoring System to ensure constant production quality and throughput.
Pumping solutions
Maglev ATH-M Series turbo pumps, with either embedded or stand-alone electronics, with possibility of CMS monitoring systems.
ADK series and ACP 120 Series dry roughing pumps with large RSV Series roots blowers.
Leak detection and pressure measurement
ASM 182-192 Series and ASM 142 Series helium leak detectors are ideal to check vacuum tightness of your coater.
Vacuum gauges series 2000 provides accurate and robust pressure management of process chamber.
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