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Small area coating

The number of products used in everyday life that require vacuum coating is increasing rapidly. Vacuum coatings are used to enhance a product’s cosmetic apearance as well as its functionality.

Adixen vacuum products have a proven record of high reliability and high performance in R&D as well as in high volume production coating applications. They have been used successfuly in PVD or reactive sputtering, thermal evaporation and CVD, chemical vapor deposition.

Each of these coating processes presents its own set of challenges for the vacuum system. Alcatel Vacuum Technology has developed several different pumping solutions, each tailored to the demands of a specific vacuum coating process.

Below you will find an overview of several coating applications and the recommended Adixen products, by product type.

Other application domain(s) :

Data storage :

Manufacturing of CDs or DVDs requires coating with various materials, one by one, at a speed up to 1 disk per second. This high throughput can only be achieved utilizing robust pumping solutions for the load/lock and sputtering chambers.

Pumping solutions

The Adixen ATP Series turbopumps backed by the Adixen PASCAL Series rotary vane pumps have demonstrated high reliability in this demanding, high production environment. Hundreds of ATP150 and 2021 primary pumps are installed all around the world.

Leak detection

The ASM 182-192 Series and ASM 142 Series helium leak detectors are ideal for this application.

Vacuum Gauges AP2004 and ACC2009 ensure accurate and robust pressure management of load-lock and process chamber.

Product(s) linked to this apllication :

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Vacuum Technology Expert

Leak Detection Expert

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