Product

Maglev turbo molecular pump

ATP 2300M

Maglev turbo pump with enhanced performance

Alcatel Vacuum Technology expands its product range by introducing the ATP2300M, a high flow Maglev turbopump, offering enhanced light gas pumping.

The ATP2300M is designed for vacuum applications that require high pumping speed combined with high gas throughput, up to 3000 sccm N2.

The performance of this pump makes it suitable for both light and harsh applications including Semiconductor Implant and HDPCVD, R/D, Coating, etc.

ATP 2300M

Documentation :

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Related application(s) :

Analytical Instrumentation & Research
Analytical Instrumentation & Research

Coating
Coating


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