Product

New hybrid turbomolecular pump

ATH 500 M

Adixen introduces its new Maglev hybrid turbomolecular pump

Alcatel VacuumTechnology is proud to introduce the newest hybrid turbomolecular vacuum pump to its maglev product offering;  the ATH500M.

This pump offers the advanced technology of magnetic bearings for medium sized applications.  The compact design with integrated control electronics provides the high reliability of 5-axis, maglev rotor suspension to the 300-500 l/s application range on flanges as small as DN100 and easily replaces most conventional ball bearing turbopumps of similar pumping speed in embedded applications.

ATH 500 M
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Related application(s) :

Analytical Instrumentation & Research
Analytical Instrumentation & Research

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Semiconductor

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