High vacuum pumps

Hybrid maglev turbopumps

Maglev hybrid turbomolecular pumps - 400 l/s to 2100 l/s - for SC, coating and other industrial applications ATH-M Series

New hybrid turbomolecular pump ATH 500 MT

. Mid-size maglev hybrid turbomolecular pump ATH 2303 M

New Maglev hybrid turbomolecular pump - specifically designed for Photovoltaic applications ATH 3200 M

Maglev turbo molecular pump - for enhanced light gas pumping ATP 2300M