Documentation : |
||
|---|---|---|
|
See the ATP 2300M Flyer | Download |
|
Request a quotation | Submit |
Related information(s) : |
|---|
Related application(s) : |
||
|---|---|---|
|
Maglev turbo molecular pump
ATP 2300M
Alcatel Vacuum Technology expands its product range by introducing the ATP2300M, a high flow Maglev turbopump, offering enhanced light gas pumping.
The ATP2300M is designed for vacuum applications that require high pumping speed combined with high gas throughput, up to 3000 sccm N2.
The performance of this pump makes it suitable for both light and harsh applications including Semiconductor Implant and HDPCVD, R/D, Coating, etc.
