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New Maglev hybrid turbomolecular pump
ATH 3200 M
Alcatel Adixen expands its product range by introducing the ATH3200M, a high flow Maglev turbo-molecular pump offering enhanced performance in ISOF 320 flange.
The ATH3200M is designed for vacuum applications that require high pumping speed combined with high gas throughput up to 5000 sccm N2.
The performance of this pump makes it suitable for light and harsh processes including 300 mm Semiconductor applications, Flat Panel Display, Photovoltaic, Coating, R/D, Space simulator, etc.
