Documentation : |
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See our ATH Series brochure | Download |
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See our ATH Series flyer | Download |
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Hybrid turbomolecular pumps
ATH Series
The Adixen ATH series offers a complete range of hybrid turbomolecular pumps from 30 to 300l/s.
• ATH 31
• ATH 200
• ATH 300
The pump design principle of turbomolecular stages exhausting to Holweck stages provides high pumping capacity, low inlet pressure and high exhaust pressure.
These pumps provide a clean, dry vacuum (hydrocarbon and particulate free) when backed by a membrane (AMD) or multi-roots (ACP) pump.
Key Benefits:
• Robust against:
- Shock
- Movement
- Air inrush
• Pump may be mounted in any orientation:
- only one part number to order, stock and maintain
• Pump a volume or back another pump
• Connect a less expensive vacuum gauge to monitor the inlet pressure
• Connect a venting valve to provide a more compact solution
Features
• Low rotational speed
• Grease lubricated bearings
• Intermediate vacuum ports
Typical Applications are:
Mass spectrometry, leak detectors, electron microscopes, R&D, general low inlet pressure requirements, deposition.
• ATH 31
• ATH 200
• ATH 300
The pump design principle of turbomolecular stages exhausting to Holweck stages provides high pumping capacity, low inlet pressure and high exhaust pressure.
These pumps provide a clean, dry vacuum (hydrocarbon and particulate free) when backed by a membrane (AMD) or multi-roots (ACP) pump.
Key Benefits:
• Robust against:
- Shock
- Movement
- Air inrush
• Pump may be mounted in any orientation:
- only one part number to order, stock and maintain
• Pump a volume or back another pump
• Connect a less expensive vacuum gauge to monitor the inlet pressure
• Connect a venting valve to provide a more compact solution
Features
• Low rotational speed
• Grease lubricated bearings
• Intermediate vacuum ports
Typical Applications are:
Mass spectrometry, leak detectors, electron microscopes, R&D, general low inlet pressure requirements, deposition.
