Modelisation:

- R. Bernard, A. Favre, H. Kambara, Agnès Roche, “Using numerical simulation to optimize 300mm FOUP purging” Solid state technology October 2003 issue, p.71 (2003)

- R. Bernard, A. Favre, H. Kambara, “Preventing wafer contamination” Fluent news letter spring 2004 issue, p22 (2004)
Article available in Press Release section / Advanced Systems in english and japanese version

- R. Bernard, A. Favre, H. Kambara, “Preventing wafer contamination” Cleanroom Technology June 2004 issue, p27 (2004)

- A. Favre, H. Kambara,  “Physical comprehension of the wafers isolation pod (FOUP 300 mm) purge phenomena by a numerical simulation tool”, SEMICON Japan 2004 SEMI Technology Symposium, p6-62 (2004)
- A. Favre, H. Kambara,  “Contamination comprehension in a clean room and its reduction method optimization by fluid dynamic simulation”, SEMICON Korea 2005
- H. Kambara, “Advanced Solutions for Micro and Nano technologie”,  Nanoforum symposium, Milan/ Italy, Sept 2005

APA : Adixen Pod Analyser
- H. Kambara, “Airborne Molecular Contamination Monitoring in the substrate carrier for 300mm fab by Ion Mobility Spectrometry with Adixen Pod Control Station”, AEC/APC Symposium Asia – Taiwan, December 2006

- Philippe Maquin , Arnaud Favre , Xavier Metais  Airborne Molecular Contamination Monitoring of 300mm Front Opening Unified Pod (FOUP) by Ion Mobility Spectrometry   3rd ISMI Symposium on Manufacturing Effectiveness October 9-11, 2006 Austin Texas

APR : Adixen Pod Regenerator

- H. Kambara, E. Godot, E. Veran, B. Pelissier, V. Loup, D. Bensahel, O. Joubert; “Controlling Germanium Oxidation With a Vacuum Substrate Carrier”, Semiconductor International, March 2007.
Article available in Press Release section / Advanced Systems

APS : Adixen Plasma Sensor

Philippe Maquin, Julien Bounouar, Gloria Sogan Jean-pierre Desbiolles, Roland Bernard Advanced Integrated Solution for Humidity Measurement  into a Transfer Chamber
5th European AEC/APC Conference Dresden  April 14-16, 2004

- Philippe Maquin, Guillaume Gaudfroy, Jean-josé Galiano, Julien Bounouar, Jean-pierre Desbiolles , STM-Crolles / Adixen “ Advanced Etch Tool Control on Humidity Mesurement with a Plasma Sensor  6th European AEC/APC Conference Dublin, Ireland, April 6-8, 2005

- Philippe Maquin, Julien Bounouar, Jean-pierre Desbiolles, Serge Brandolin “ Advanced Integrated Solution for Humidity Measurement “ AEC/APC Symposium XVII September 24-29, 2005 Indian Wells, California

Vacuum Transport:

- Philippe Maquin “ EUV Mask Carrier & Load Port Standards Session “ SEMICON West Marriot Hotel , San francisco 2006