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Deep Plasma Etching and PECVD Systems

Products

Vacuum Technology

Roughing pumps

- Oil lubricated Roots Pumping system:Oil lubricated Roots Pumping System

- Small Dry Vacuum Roughing Pumps:ACP Series 2

- General purpose dry vacuum pumps:ACP 120 Series

- Mechanical Diaphragm Vacuum Pumps:AMD Series

- Rotary Vane Vacuum Pumps:PASCAL Series

- Roots vacuum pumps:RSV Series

- Roots pumping systems:Roots pumping systems

- Dry roughing pumps:ACP Series

Process dry pumps

- Multi-process dry vacuum pumps:ADP/ADS Series Two

- Low power consumption process pumps:A3P Range

- Dry pumps for fast evacuation of harsh process:ADKH range

- Dry pumps for fast evacuation of medium process:ADKP range

- Large dry pumps for harsh process:AD3KH

Load lock dry pumps

- Integrated Light Process Dry Pumps:A100L

- Dry pumps for fast evacuation of large volumes:ADKL range

Dry pump systems

- Plug and Play Tool Pumping Systems:ATPS 2

Dry pump accessories

- Accessories - Traps:Traps

- Accessories - APMS:APMS

Contamination Management Solutions

- Introduction:Vacuum Technology

- Molecular contamination monitoring tool for carriers and substrates:Adixen Pod Analyser (APA)

- Molecular decontamination and protection for carriers and substrates:Adixen Pod Regenerator (APR)

- Equipment Contamination Control Tool:Exhaust Pressure Control (EPC)

- Modelisation:Simulation Expertise

High vacuum pumps

- New hybrid turbomolecular pump:ATH 500 M

- Hybrid turbomolecular pumps:ATH Series

- Turbomolecular pumps:ATP Series

- Molecular Drag Pumps:MDP 5011

- Maglev hybrid turbomolecular pumps:ATH-M Series

- New Maglev hybrid turbomolecular pump:ATH 3200 M

- Maglev turbo molecular pump:ATP 2300M

Turbomolecular pumping systems

- Compact dry pumping systems:Drytel Series

- Turbomolecular pumping systems:Turbomolecular pumping systems

- Compact turbomolecular pumping systems:Packtel 1025

Vacuum Instruments

- Vacuum Measurement:2000 series Vacuum Gauges

- Moisture monitoring system for freeze-drying:Lyotrack

Vacuum accessories

- Vacuum Valves:Vacuum Valves

- Vacuum Components:Flanges & Fittings

Leak detectors

Helium leak detectors

- Helium Leak Detectors:Helium Leak Detection

- Multipurpose Helium Leak Detectors - ASM Graph Series:ASM Graph Series

- Portable Helium Leak Detector:ASM 310

- Multipurpose Helium Leak Detectors:ASM 142 Series

- High Performance Helium Leak Detectors:ASM 182-192 Series

- Portable Dry Sniffing Helium Leak Detectors:ASM 102S

- Integrable Industrial Helium Leak Detectors:ASI 20 MD

- Helium Leak Detection Workstations:ASM 1002

- General purpose accessories:General purpose accessories

- High performance dry leak detector:ASM 192T2D+

- Helium Leak Detection Techniques:Helium Leak Detection Techniques

Gauges

- Measurement:Vacuum Measurement

- Vacuum Measurement:Vacuum Gauges

Hydrogen leak detectors

- EX- approved Leak Detector EXTRIMA:EXTRIMA

- Accessories – Complete Gas Injection Kit to Extrima:Complete Gas Injection Kit

- Tracer Gas Controller:ILS500-F

- Industrial Leak Detector:H2000 PLUS

- Industrial Leak Detector:H1000

- Leak Detection System:ILS500

- Utility Leak Detector:9012 XRS

- Tracer Gas Controller:ILS 500-F

- Accessories - probes:H2000-Accessories

- Accessories - probes:9012 XRS - Accessories

- Tracer Gas Filler:TGF10

- Calibration of Hydrogen Leak Detector:Reference Leaks

Vacuum Technology

Vacuum Technology

- XPS analysis:XPS analysis with an ultra-clean vacuum substrate carrier

- AMC new version:AMC new version

Markets & Applications

Vacuum Technology Expert

Analytical Instrumentation & Research

- Analytical Instrumentation : Mass spectrometry

- Analytical Instrumentation : Electron microscopy

- Analytical Instrumentation : Surface area analysis

- Analytical Instrumentation : Magnetic Resonance Imaging (MRI) / Nuclear Magnetic Resonance (NMR)

- Analytical Instrumentation : Optical spectrometry

- R & D : Particle accelerators

- R & D : Laboratories & universities

- R & D : Space / experimental chambers

Coating

- Large area coating : Architectural glass coating

- Large area coating : Metal strip coating

- Small area coating : Data storage

- Small area coating : Tool and/or decorative Coating

- Small area coating : Optical coating

Semiconductor

- Dry Pumps : Light process

- Dry Pumps : Medium process

- Dry Pumps : Harsh process

- Traps : Adixen Trap Solutions

- Leak detectors : Helium leak detectors

- Leak detectors : Hydrogen leak detectors

- Maglev turbomolecular pumps : Stand-alone products

- Maglev turbomolecular pumps : Embedded products

- Maglev turbomolecular pumps : CMS (Control Monitoring System)

- Monitoring Systems : APMS

- Monitoring Systems : APS 500

- Monitoring Systems : CMS

- Vacuum gauges and valves : Vacuum valves

- Advanced Systems : Advanced Systems

Flat Panel Display & Photovoltaic

- Dry pumps : Light process

- Dry pumps : Medium process

- Dry pumps : Harsh process

- Maglev pumps : Embedded products

- Maglev pumps : Stand-alone products

- Maglev pumps : CMS (Control Monitoring System)

- Leak detectors : Helium leak detectors

- Leak detectors : Hydrogen leak detectors

Medical & Pharmaceutical

- Medical : Plasma sterilization

- Medical : Vacuum autoclave sterilizer

- Medical : High speed centrifuge

- Medical : Implants

- Medical : MRI / Radio-therapy/radio-pharmacy

- Medical : Radio Surgery

- Pharmaceutical : Freeze-drying

- Pharmaceutical : Drug Packaging

Industry

- Automotive : Circuit filling

- Lamp industry : Lamp manufacturing

- Air conditioning Refrigeration : Filling and draining

- Electron tubes : Electron tubes

- Gas industry : Cleaning and filling

- Plasma cleaning : Surface treatment and cleaning

Leak Detection Expert

Automotive

- Automotive Components

- Safety components

Refrigeration

- Refrigeration components

- Final assembly test

Air conditioning

- Components integrity tests

- Final assembly test

Transportation air conditioning

- Component integrity tests

- Final assembly test

Power generation

- Power generation

Electrical components

- Integrity test

Packaging

- Packaging

Liquid and gas transportation

- Commissioning & maintenance

Pressurized cables

- Maintenance of pressurized telecom cables

Aircraft

- Manufacturing & maintenance

Heating systems

- Integrity & safety test

Gas industry

- Compressed gas containers test

Petrochemical

- Manufacturing / transportation/ storage

Hydrogen energy

- Energy transportation

Industry

- Industrial components

Medical

- Medical devices

Support & Services

About Us

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Environment, Health & safety

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Useful links

DIRECTORY - Vacuum Guide

DIRECTORY - Semiconductor Manufacturing

ORGANISATION - JEMI France

How to Find us

Look a leak

Press & Publications

News

Corporate

- 24th European PV Conference

- New ATH 500M

- Paris Air Show 2009

- Semicon China 2009

- Photon Munich 4-6th March 2009

- Screensaver from Adixen by Alcatel Vacuum Technology

- New ADK big dry mumps

- Semicon Europa 2008

- VTE exhibition-Milan, Italy

- Semicon Taiwan 2008

- Adixen new Capabilities Brochure

Vacuum Technology

- Vapor Pumping with ACPs

- Retrofit of pumps

- Airborne Molecular Contamination Detection Method for decontamination

- Singapore Internation Water Week (22-26 Jun) - SUCCESS!

- Lyotrack has the best sensitivity to determine drying endpoint times

- PS Vietnam (31 March - 2 April 2009)

- AsiaNANO @ Biopolis (3rd - 7th Nov)

- A new success for Lyotrack !

- Adixen products in the pharmaceutical industry

- New Vacuum Gauges

- A3P Dry vacuum pumps range for Medium applications

- ATP 2300 M

- Lyotrack

- ATPS 2

Leak detectors

- Singapore Internation Water Week (22-26 Jun) - SUCCESS!

- PS Vietnam (31 March - 2 April 2009)

- ASM310 video

- AsiaNANO @ Biopolis (3rd - 7th Nov)

- Workstation Leak Detector ASM 1002

- Hydrogen leak detection for Semiconductor applications

- AMG12

- Helium leak detection - ASM 1002

- Alcatel Vacuum Technology acquires Sensistor Technologies

- New ASM Graph D+

- ASM Graph series

Press releases

Vacuum Technology

- Alcatel Vacuum Technology has received a 'Supplier Excellence Award' from LAM Research for the second consecutive year.

- Adixen guarantees secure freeze-drying.

- The new Adixen 2000 range of gauges revolutionizes vacuum measurement.

- Lyotrack : Humidity monitoring for freeze-drying application

- Adixen maglev turbo pump for the glass coating industry.

- The Adixen ATH 300 by Alcatel Vacuum Technology "New hybrid turbomolecular pump"

- The Adixen A300 : Compact multi-process dry pump for etch applications

- ATH 200 New hybrid turbomolecular pump for analytical instrumentation

- ACP120 series General purpose dry pumps for Industrial and R&D applications.

- AMD series Oil-free diaphragm pumps AMD1 and AMD 4 are now available

- ATPS 2 New plug-and-play tool pumping and abatement system from Alcatel slashes footprint dramatically

- Drytel 1025 : Compact dry pumping system

- Alcatel IPUP Frequently Asked Questions

- Revolutionary Integrated Point-of-Use Pump from Alcatel cuts costs, saves energy

- Adixen ATH 2300M : A very high flow Maglev Turbopump in a very small package size

- Pascal Series, the Rotary Vane Pumps and Accessories dedicated to Applications ...

- Alcatel ATH / M series A very high flow Maglev Turbopump for semiconductor applications

- Alcatel Turbomolecular Pumps which focus on reliability and robustness, the ATP Series :

- Roots Vacuum Pumps and Pumping Systems

- The Alcatel dry pums range : the ADP/ADS Series Two

Leak detectors

- Alcatel Vacuum Technology launches its Adixen Sensistor hydrogen leak detection system: H2000 PLUS.

- Alcatel Vacuum Technology acquires Sensistor Technologies for its leak detection solutions

- How to choose a helium leak detector

- ASM 1002 : Two solutions in one unit Designed for leak tight packaged electronic devices and much more !

- New ASM 102S Portable Dry Sniffing Leak Detector

- ASM 192 T2D+ : The most powerful console dry leak detection.

- ASM 182 TD+ High performance dry leak detector

- Introducing the new Alcatel vacuum measurement products.

- ASI 20 MD Modular Leak Detector

- ASM122D : Helium Leak Detection Alcatel offers the most powerful Portable dry leak detector on the market

Vacuum Technology

- XPS Analysis

Technical publications

Vacuum Technology

- New methods and processes based on advanced vacuum technology

- Lyotrack has the best sensitivity to determine drying endpoint times

Tips of the month

Vacuum Technology

- TIP OF THE MONTH 17 : Rotary vane pump

- TIP OF THE MONTH 16 : Rotary Vane Pumps and Oil Back-Diffusion

- TIP OF THE MONTH 12 : Pump out need

- TIP OF THE MONTH 11 : Vacuum technology catches drug-takers

- TIP OF THE MONTH 03

- TIP OF THE MONTH 05

- TIP OF THE MONTH 06

- TIP OF THE MONTH 07

Leak detectors

- TIP OF THE MONTH 18 : Tests chambers

- TIP OF THE MONTH 15 : Wireless operation of leak detectors

- TIP OF THE MONTH 13 : Mass spectrometer in a helium leak detector

- TIP OF THE MONTH 10 : Lifetime of a calibrated leak

- TIP OF THE MONTH 01

- TIP OF THE MONTH 02

- TIP OF THE MONTH 04

- TIP OF THE MONTH 08

- TIP OF THE MONTH 09

Application reports

Leak Testing Meets - New Semiconductor Industry Needs

Helium leak testing on long gas lines

Undetectable "virtual" leaks

Leak Testing Sealed Packages

Helium leak detection of glass coating equipment

New plug-and-play tool pumping and abatement system

Revolutionary Integrated Point-of-Use-Pump

New Dry Backing Pump Offers Ultra-Clean Operation

How to avoid vapour condensation in dry primary vacuum pumps

Past and present: milestones in development of

Application reports

Technics

- Where is my leak?

- Does my product leak?

The Gaz

- The gas / Hydrogen

- The gas / Safety

- The gas / Environment