Deep Plasma Etching and PECVD Systems

Alcatel Micro Machining Systems: a technology leader in deep plasma etching and PECVD

Alcatel Micro Machining Systems (AMMS) is a subsidiary of Alcatel Vacuum Technology France located in Annecy, France. AMMS is specialized in designing, manufacturing, marketing and servicing DRIE plasma etching systems as well as PECVD equipments for the fabrication of MEMS (Micro Electro Mechanical Systems) and Semiconductor devices. Its main application markets are the telecommunication, automotive, aerospace, computer peripheral, biomedical industries and Semiconductors including power devices and wafer level packaging. Main products are single chamber systems for R&D and Cluster tools for volume production of silicon wafer technology.

AMMS is committed to support its customers through an international network of sales and service offices. Application laboratories in France, USA, Taiwan and Japan provide its customers with process development and process demonstration. At the beginning of 2007, AMMS had a worldwide ICP tool installation base of more than 200 sites in the United States, Europe and Asia.

For more information:
Alcatel Micro Machining Systems
98, avenue de Brogny – BP 2069
74009 Annecy Cedex
Phone: 33 (0)4 50 65 77 77
Fax: 33 (0)4 50 65 76 44